Method and apparatus for 2-d spatially resolved optical emission and absorption spectroscopy
A Standard patent application filed on 28 November 2001 credited to Mitrovic, Andrej S.

Details

Application number :
2002230437  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Method and apparatus for 2-d spatially resolved optical emission and absorption spectroscopy  
Inventor :
Mitrovic, Andrej S.  
Agent name :
 
Address for service :
 
Filing date :
28 November 2001  
Associated companies :
 
Applicant name :
Tokyo electron Limited  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor