Integrated cmos capacitive pressure sensor
A Standard patent application filed on 19 November 2001 credited to Mcneil, Andrew C.
;
Gogoi, Bishnu P.
;
Monk, David J.
;
August, Richard J
;
Hughes, Donald L.
;
Schmiesing, John E.
;
Neumann, Kevin D.
;
Odle, David W.
Details
Application number :
2002228637
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Integrated cmos capacitive pressure sensor
Inventor :
Mcneil, Andrew C.
;
Gogoi, Bishnu P.
;
Monk, David J.
;
August, Richard J
;
Hughes, Donald L.
;
Schmiesing, John E.
;
Neumann, Kevin D.
;
Odle, David W.