Details
- Application number :
- 2002222968
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Silica zeolite low-k dielectric thin films
- Inventor :
- Wang, Zhengbao
;
Yan, Yushan
- Agent name :
-
- Address for service :
-
- Filing date :
- 06 July 2001
- Associated companies :
-
- Applicant name :
- The Regents of The Universty of California
- Applicant address :
-
- Old name :
-
- Original Source :
- Go