Pattern matching method and device, position determining method and device, position aligning method and device, exposing method and device, and device and its production method
A Standard patent application filed on 18 January 2000 credited to Yoshida, Kouji

Details

Application number :
20052  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Pattern matching method and device, position determining method and device, position aligning method and device, exposing method and device, and device and its production method  
Inventor :
Yoshida, Kouji  
Agent name :
 
Address for service :
 
Filing date :
18 January 2000  
Associated companies :
 
Applicant name :
Nikon Corporation  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor