Method for anodic bonding at low temperatures
A Standard patent application filed on 26 October 2001 credited to Gebhardt, Andreas ; Baier, Volker ; Barth, Stefan

Details

Application number :

2002221754  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method for anodic bonding at low temperatures  

Inventor :

Gebhardt, Andreas ; Baier, Volker ; Barth, Stefan  

Agent name :

 

Address for service :

 

Filing date :

26 October 2001  

Associated companies :

 

Applicant name :

Institut Fur Physikalische Hochtechnologie E.V.  

Applicant address :

 

Old name :

 

Original Source :

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