Stacked and filled capacitive microelectromechanical ultrasonic transducer for medical diagnostic ultrasound systems
A Standard patent application filed on 06 December 2001 credited to Ayter, Savig
;
Sliwa, John W. Jr.
Details
Application number :
2002220205
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Stacked and filled capacitive microelectromechanical ultrasonic transducer for medical diagnostic ultrasound systems