Heating device, heat treatment apparatus having the heating device and method for controlling heat treatment
A Standard patent application filed on 27 December 2001 credited to Sakuma, Takeshi ; Shigeoka, Takashi

Details

Application number :

2002219547  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Heating device, heat treatment apparatus having the heating device and method for controlling heat treatment  

Inventor :

Sakuma, Takeshi ; Shigeoka, Takashi  

Agent name :

 

Address for service :

 

Filing date :

27 December 2001  

Associated companies :

 

Applicant name :

TOKYO ELECTRON LIMITED  

Applicant address :

3-6, Akasaka 5-Chome, Minato-Ku, Tokyo 107-8481  

Old name :

 

Original Source :

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