Semiconductor processing equipment having improved particle performance
A Standard patent application filed on 25 June 2001 credited to Bosch, William Frederick

Details

Application number :

2002216776  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Semiconductor processing equipment having improved particle performance  

Inventor :

Bosch, William Frederick  

Agent name :

 

Address for service :

 

Filing date :

25 June 2001  

Associated companies :

 

Applicant name :

LAM Research Corporation  

Applicant address :

 

Old name :

 

Original Source :

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