Dissolution inhibitors in photoresist compositions for microlithography
A Standard patent application filed on 12 October 2001 credited to Feiring, Andrew F. ; Schadt Iii, Frank L. ; Petrov, Viacheslav Alexandrovich ; Feldman, Jerald ; Berger, Larry L. ; Zumsteg Jr., Fredrick Claus

Details

Application number :

2002214632  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Dissolution inhibitors in photoresist compositions for microlithography  

Inventor :

Feiring, Andrew F. ; Schadt Iii, Frank L. ; Petrov, Viacheslav Alexandrovich ; Feldman, Jerald ; Berger, Larry L. ; Zumsteg Jr., Fredrick Claus  

Agent name :

 

Address for service :

 

Filing date :

12 October 2001  

Associated companies :

 

Applicant name :

E.I. Du Pont De Nemours and Company  

Applicant address :

 

Old name :

 

Original Source :

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