Details
- Application number :
- 2002211730
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Plasma reactor with reduced reaction chamber
- Inventor :
- Fink, Steven T.
- Agent name :
-
- Address for service :
-
- Filing date :
- 15 October 2001
- Associated companies :
-
- Applicant name :
- Tokyo electron Limited
- Applicant address :
-
- Old name :
-
- Original Source :
- Go