Details
- Application number :
- 2001296323
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Chamber configuration for confining a plasma
- Inventor :
- Chen, Jian J.
;
Lenz, Eric H.
- Agent name :
-
- Address for service :
-
- Filing date :
- 25 September 2001
- Associated companies :
-
- Applicant name :
- Lam Research Corporation
- Applicant address :
-
- Old name :
-
- Original Source :
- Go