Method for mask repair using defect compensation
A Standard patent application filed on 01 December 1999 credited to Ray-Chaudhuri, Avijit K. ; Sweeney, Donald W.

Details

Application number :

19297  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method for mask repair using defect compensation  

Inventor :

Ray-Chaudhuri, Avijit K. ; Sweeney, Donald W.  

Agent name :

 

Address for service :

 

Filing date :

01 December 1999  

Associated companies :

 

Applicant name :

Euv Limited Liability Corporation  

Applicant address :

 

Old name :

 

Original Source :

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