Apparatus and method for flow of process gas in an ultra-clean environment
A Standard patent application filed on 28 August 2001 credited to Macdonald, Douglas B. ; Patel, Satyadev ; Macdonald, Niles K. ; Schaadt, Gregory P.

Details

Application number :

2001293225  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Apparatus and method for flow of process gas in an ultra-clean environment  

Inventor :

Macdonald, Douglas B. ; Patel, Satyadev ; Macdonald, Niles K. ; Schaadt, Gregory P.  

Agent name :

 

Address for service :

 

Filing date :

28 August 2001  

Associated companies :

 

Applicant name :

Reflectivity, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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