Gas laser chamber with vertical vibration isolator
A Standard patent application filed on 24 August 2001 credited to Ivaschenko, Alex P. ; Partlo, William N ; Das, Palash P ; Oliver, I. Roger

Details

Application number :

2001290562  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Gas laser chamber with vertical vibration isolator  

Inventor :

Ivaschenko, Alex P. ; Partlo, William N ; Das, Palash P ; Oliver, I. Roger  

Agent name :

 

Address for service :

 

Filing date :

24 August 2001  

Associated companies :

 

Applicant name :

Cymer, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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