Details

Application number :
19070  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Rms process tool  
Inventor :
Lawrenson, Christopher C. ; Wisner, James N. ; Van Doren, Thomas W ; Lucas, Timothy S  
Agent name :
 
Address for service :
 
Filing date :
01 November 1999  
Associated companies :
 
Applicant name :
MacroSonix Corporation  
Applicant address :
 
Old name :
 
Original Source :
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