Method of etching, as well as frame element, mask and prefabricated substrate element for use in such etching
A Standard patent application filed on 18 September 2001 credited to Xie, Bin
;
Bjarnason, Bjarni
;
Frennesson, Goran
;
Pettersson, Per
;
Sjoberg, Jenny
;
Gustavsson, Mikael
;
Bierings, Gust
Details
Application number :
2001290415
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method of etching, as well as frame element, mask and prefabricated substrate element for use in such etching
Inventor :
Xie, Bin
;
Bjarnason, Bjarni
;
Frennesson, Goran
;
Pettersson, Per
;
Sjoberg, Jenny
;
Gustavsson, Mikael
;
Bierings, Gust