Multi-layer, self-aligned vertical comb-drive electrostatic actuators and fabrication methods
A Standard patent application filed on 22 March 2001 credited to Pannu, Satinderpall S. ; Behin, Behrang

Details

Application number :
2001287297  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Multi-layer, self-aligned vertical comb-drive electrostatic actuators and fabrication methods  
Inventor :
Pannu, Satinderpall S. ; Behin, Behrang  
Agent name :
 
Address for service :
 
Filing date :
22 March 2001  
Associated companies :
 
Applicant name :
Onix Microsystems, Inc.  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor