Immersion lens with magnetic shield for charged particle beam system
A Standard patent application filed on 25 July 2001 credited to Devore, William J. ; Veneklasen, Lee H.

Details

Application number :

2001283511  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Immersion lens with magnetic shield for charged particle beam system  

Inventor :

Devore, William J. ; Veneklasen, Lee H.  

Agent name :

 

Address for service :

 

Filing date :

25 July 2001  

Associated companies :

 

Applicant name :

Applied Materials, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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