Composition for cleaning chemical mechanical planarization apparatus
A Standard patent application filed on 03 August 2001 credited to Small, Robert J. ; Lee, Joo-Yun

Details

Application number :

2001281072  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Composition for cleaning chemical mechanical planarization apparatus  

Inventor :

Small, Robert J. ; Lee, Joo-Yun  

Agent name :

 

Address for service :

 

Filing date :

03 August 2001  

Associated companies :

 

Applicant name :

EKC Technology, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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