Apparatus and method for controlling temperature uniformity of substrates
A Standard patent application filed on 08 August 2001 credited to Gurary, Alexander ; Boguslavskiy, Vadim ; Ramer, Jeffrey C. ; Patel, Ameesh N.

Details

Application number :

2001279230  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Apparatus and method for controlling temperature uniformity of substrates  

Inventor :

Gurary, Alexander ; Boguslavskiy, Vadim ; Ramer, Jeffrey C. ; Patel, Ameesh N.  

Agent name :

 

Address for service :

 

Filing date :

08 August 2001  

Associated companies :

 

Applicant name :

Emcore Corporation  

Applicant address :

 

Old name :

 

Original Source :

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