Details

Application number :
2001279230  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Apparatus and method for controlling temperature uniformity of substrates  
Inventor :
Gurary, Alexander ; Boguslavskiy, Vadim ; Ramer, Jeffrey C. ; Patel, Ameesh N.  
Agent name :
 
Address for service :
 
Filing date :
08 August 2001  
Associated companies :
 
Applicant name :
Emcore Corporation  
Applicant address :
 
Old name :
 
Original Source :
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