Apparatus and method for synthesizing films and coatings by focused particle beam deposition
A Standard patent application filed on 19 July 2001 credited to Heberlein, Joachim
;
Rao, Nagaraja P.
;
Gerberich, William
;
Girshick, Steven L.
;
Mcmurry, Peter H.
Details
Application number :
2001277007
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Apparatus and method for synthesizing films and coatings by focused particle beam deposition
Inventor :
Heberlein, Joachim
;
Rao, Nagaraja P.
;
Gerberich, William
;
Girshick, Steven L.
;
Mcmurry, Peter H.