Method and apparatus for cleaning and method and apparatus for etching
A Standard patent application filed on 31 July 2001 credited to Sonobe, Jun ; Ino, Minoru ; Nishikawa, Yukinobu ; Kimura, Takako ; Kuroda, Yoshikuni ; Zils, Regis

Details

Application number :

2001276707  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and apparatus for cleaning and method and apparatus for etching  

Inventor :

Sonobe, Jun ; Ino, Minoru ; Nishikawa, Yukinobu ; Kimura, Takako ; Kuroda, Yoshikuni ; Zils, Regis  

Agent name :

 

Address for service :

 

Filing date :

31 July 2001  

Associated companies :

 

Applicant name :

L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE  

Applicant address :

75, Quai d'Orsay, F-75321 Paris Cedex 07  

Old name :

 

Original Source :

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