Automated electrode replacement apparatus for a plasma processing system
A Standard patent application filed on 19 July 2001 credited to Strang, Eric J. ; Bibby, Yu Wang ; Sirkis, Murray D. ; Cronin, John E

Details

Application number :

2001273536  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Automated electrode replacement apparatus for a plasma processing system  

Inventor :

Strang, Eric J. ; Bibby, Yu Wang ; Sirkis, Murray D. ; Cronin, John E  

Agent name :

 

Address for service :

 

Filing date :

19 July 2001  

Associated companies :

 

Applicant name :

Tokyo electron Limited  

Applicant address :

 

Old name :

 

Original Source :

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