Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (apc) framework
A Standard patent application filed on 03 July 2001 credited to Coss Jr., Elfido ; Riley, Terrence J. ; Wang, Qingsu

Details

Application number :

2001271800  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (apc) framework  

Inventor :

Coss Jr., Elfido ; Riley, Terrence J. ; Wang, Qingsu  

Agent name :

 

Address for service :

 

Filing date :

03 July 2001  

Associated companies :

 

Applicant name :

Advanced Micro Devices Inc.  

Applicant address :

 

Old name :

 

Original Source :

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