A method and device for improved salicide resistance on polysilicon gates
A Standard patent application filed on 04 November 1999 credited to Jan, Chia-Hong
;
Tsai, Julie A.
;
Yang, Simon
;
Myers, Alan
;
Whitehill, Kevin A.
;
Keating, Steven J.
;
Ghani, Tahir
Details
Application number :
18143
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
A method and device for improved salicide resistance on polysilicon gates
Inventor :
Jan, Chia-Hong
;
Tsai, Julie A.
;
Yang, Simon
;
Myers, Alan
;
Whitehill, Kevin A.
;
Keating, Steven J.
;
Ghani, Tahir