Plasma focus light source with active and buffer gas control
A Standard patent application filed on 07 June 2001 credited to Fomenkov, Igor V ; Rauch, John E. ; Partlo, William N ; Ness, Richard M. ; Melnychuk, Stephan T. ; Sandstrom, Richard L

Details

Application number :
2001268288  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Plasma focus light source with active and buffer gas control  
Inventor :
Fomenkov, Igor V ; Rauch, John E. ; Partlo, William N ; Ness, Richard M. ; Melnychuk, Stephan T. ; Sandstrom, Richard L  
Agent name :
 
Address for service :
 
Filing date :
07 June 2001  
Associated companies :
 
Applicant name :
Cymer, Inc.  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor