Sputtering target
A Standard patent application filed on 29 May 2001 credited to Kim, Jaeyeon
;
Yan, Zhihua
;
Pitcher, Philip George
;
Rushing, Michael Alan
Details
Application number :
2001265126
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Sputtering target
Inventor :
Kim, Jaeyeon
;
Yan, Zhihua
;
Pitcher, Philip George
;
Rushing, Michael Alan