Photolithographically-patterned out-of-plane coil structures and method of making
A Standard patent application filed on 10 May 2001 credited to Chua, Christopher L.
;
Fork, David K.
;
Sun, Decai
;
Smith, Donald L.
;
Romano, Linda T.
;
Lemmi, Francesco
;
Lu, Jeng Ping
;
Van Schuylenbergh, Koenraad F.
;
Peeters, Eric
Details
Application number :
2001261322
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Photolithographically-patterned out-of-plane coil structures and method of making
Inventor :
Chua, Christopher L.
;
Fork, David K.
;
Sun, Decai
;
Smith, Donald L.
;
Romano, Linda T.
;
Lemmi, Francesco
;
Lu, Jeng Ping
;
Van Schuylenbergh, Koenraad F.
;
Peeters, Eric