Submicron semiconductor device having a self-aligned channel stop region and a method for fabricating the semiconductor device using a trim and etch
A Standard patent application filed on 27 April 2001 credited to Wang, John Jianshi
;
Templeton, Michael K.
;
Higashitani, Masaaki
Details
Application number :
2001261086
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Submicron semiconductor device having a self-aligned channel stop region and a method for fabricating the semiconductor device using a trim and etch
Inventor :
Wang, John Jianshi
;
Templeton, Michael K.
;
Higashitani, Masaaki