Non-contact seal using purge gas
A Standard patent application filed on 02 May 2001 credited to Hansell, Eric C. ; Ivaldi, Jorge S. ; Shamaly, Thomas P. ; Huse, Richard L. ; Krehley, Stephen G. ; Herrera, Jose V.

Details

Application number :

2001259331  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Non-contact seal using purge gas  

Inventor :

Hansell, Eric C. ; Ivaldi, Jorge S. ; Shamaly, Thomas P. ; Huse, Richard L. ; Krehley, Stephen G. ; Herrera, Jose V.  

Agent name :

 

Address for service :

 

Filing date :

02 May 2001  

Associated companies :

 

Applicant name :

Silicon Valley Group Inc  

Applicant address :

 

Old name :

 

Original Source :

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